STiMage 3.1 03/03/04 17:15:30 0 1 0 256 256 131072 1 X -1.953E-10 1.857E-06 m Y -1.860E-10 -7.910E-07 m Z 1.240E-12 1.141E-09 m XY 0.000E+00 0.000E+00 IV 3.901E-11 1.523E-01 scan 1 3.900E-04 id 41771735 512 Topography t||tXD