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R vu|Rty{&<g&pFV+8(s|G_r>2":o^9(/=`2}q{hRtanpgIm]:gl.Gb/BXYOT&tkD,+LE '(l=Za5 vPNOv+`\X)aj#*z !+!H!)! !!! !!!-!! ` 3 m H 8  : K q  ~ 4cxErA6%}C.zb-&&<7@l}^h*Hhg nXnu^Ky!ML<5 YnT)72X+},oW1HUX8qr KyLdG.%~@RN fENxm>#<l@g.lY3-iU !M!P! ] *   k . ; JO40e`m^% w FexgxS !#! !:!Z! / S i \]&??& O"#G%&?()6+,-./0dz\WT^phiy}nrVq)P.$)}QV% :+yb[qa'LgB&s5vu,uVRpiMJUC;  ?   z f k ^?"jN2I MKCbOT~O+ n ! ^ m ! e h~_DDDKhc   ~!"r$%j'(a*+D-"4yoV&=Fch@*-dE?OW#+kd[iI)7a0BzIii<hJ65\nAWR=p]R\9l F  =  h H'9wGpV{T$yV~Oa  N q  i'!H5j*GeX?`"GPt~g)+W&4l}5#z'[2I (Is/?Yv\Zq"O.9y6**]X[Q.8+J6L#06^|5UUT]fA0zxs)s  [B:@52eOf<>`I`GZ6jU0mE ( wK)B 8k[!"T$%M'(E*+9-./!!v+|MO6MMh8oJa9ICqN(W`&yL[a{zK2-$Aw:Yi7*Md]PjMg$ZqY[`a"4,zkn0]x]xvb9&XqJ&P~&)p7rdi+0  D [UfR**T@JJS@BDR 6g5"d"/ !%#$&')* ,-cdEc3s`% ]/c4l'%peiQqzxxYpIPPq ,SM^` wu0|&W~jE8H@N_eB>(T;k<5  z]PA>q)l;k7*i>;=D~d&Pdt[yfb=_%^3 ) 42JS14 &116~RZdN%t 9aN"_*r D$6.HIe`4WJ@5W[xeWKGV[YSeD`O 3gUF*A5Qh FOWz]d*4z2Lyghew-[bi{"LG)f5-PF4XAiH R))> z X Z g O O " rbBCA5?3`.nRUk@G|eS(@]qnba{Yjs^Ri3.vJAN4}NopU0ZJ4<~M'{uNefA}iBq2M9U`Z}`hQzv7d E ")y*ij]TW9%lLI <[Jf^   4  qky_[ EK~*7\Wr@ +#XlTQ#Dxcuaz<+T4dj uv_hh>eX|WAYkw)=,McZja~J'RZeh.B._o,mb   U  GQ;\L&hr=t?KI\MW.B }U n H Y X 9  K (  >teQN.8oaRA~r)$l DZeF" @#HVhgDgegu^@'4KteK.CT}[ '!!Z!!! t  0 HIkB;> T\)z}t+HgZgkj+SA1:`CU921nz8F S WZzmx@0O Y  *  h 0 S l  LhoEo<,+_7U-*GrA +$Xf:>Co%MY3<%PJ/)v@4P (!!!=!!2!5!! (!j! T_I3^w7eBFWIIU)(U e9a3tx#Mle^Q y {:a =$Yi gN y }]C5.4 %Mvwx3q[|qe#kHtn<$',;3^E(vls$!'# <>+!\ !K!J!1!!:!H!!c!2! ! 3$Lvo7 mf!~\i@2^# jvA~oI+|c~TkW>xdp `l9FH zaugww| 9tZnre\-Eyug3E 1Hv0kJl]($j!!$;P: +!5! ! 5!b!a!.E@y Zq5W$""8U,5TcP j , 2tOxWR'@[Uj1"H,IeGGpwhp=/rHfhmhpc+nVK#?@A#BzO(OP{c-(\akX8j!5AL:d'45!/A| Z9wU0s:oz.Dg-wRJxM:@5!SYUKHsoa\}ui  B(kW x;Lg8jF4Y>/w?H_"OXg~S[PmOytW)&f%MXyQV)?J5=nMXI V;L/L+#M/  6H j$;r^hi1om@*xruWC#xfmKyMXys#a5pSg U%8ezc ?C;&i7f4cWW`6CWn^SHOTqQLdseWRE#!&-b32RZr7]zg)>QMoA=M5 t!M{-f.T>f!v#Ra;)cGU\0xpwILwY+ZFN<J^1 ^EPF+t^p Qs+&:vW2W-3 n%# +zC$0G?~E|h3~1%v%/$e]u%cc,(3LE6@ej'rWc?'gl&  IjWx4n[=7&  )~gn' Hg)(pZQC>pK8 TMexxvF5y! Bg ?UXlVx H & x6:|t/$X6IXON\Iv?yz}~hNg|jXgnH[vC3Mf16-kac 7sgiTZh~u;9Jcyhz`orM7Gd|{ZjYh",31uT8^MRL=)fP?W:3c sVlKU3p?T*aHsEi)hoE>      A6Z_HjbX*_t(.eE. cozE -8lAv7HeAU&C2 EO]-L/'Nsjm@u$ '+DJS.[OvL')$eh=Ho&st@fNeV7HFx $.]NGs: XSD{x1Q#)  {kU:cmG:*{15aZR{mP-<nbV 8yk;oc`flU> Vmyim*fNfEfO`&Yd^9@~l?ymwLCOGI+oZi<XW#$G8 s/KDHu:pc~ 1 -q!a6W4zB\=EtxX+!6E[:z3#GfnmJZ.1#8D8+C*)`H"-`'>@lVzMS8`J|T>:]-pT_]9sd*czI,eR 44T,~[*;Z9!*r##W5 :` &  U _ K W & Mea,bos5=EIxtVL34ekEV:3(EKD8K)()6VE:w'/%GU |SZ3H-I9tWgTVOC8GB`D[&5 *'i<-$FKR7FrCEMGZYy6^F*\745| - b( z 8 S T  +} :&aOk3-2z  *]$x@FMJ2'HI,33Dg{_o%8PXI{k(.V:J Q5J;-U$ DKC:DnZ sE<PLWa<?fB)xS2j8f8_QPd6) e [HS b . b }_B2#%,Hpfr!J1`"9F1}^"7 ZIXe}?Y-b,&ksYMPQvtnkc|y[7.2hQ2q1Wft}8OYy^WH|gB>ew|}qedjsi^IK-p3wrmv !n''vX]B5   r J E ! u E` B/'>Q n\83 H\ s9g=+10  iYY!9pT.G* 5aO/a`LC>y2Kn$EdXk\@47j@gAiUmwmkn^4jrKQ0&tHWx^8KB=0}Xj4.dM"TU8B1\*8C__i*p? t )  Z o ;n- t 9+Y&?' 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C94Mceb m{`*>H4S_'x'xMO}aj9Pf~C),mB+q,-C8tmzr { Kh;pa?OGkt./a|6dKaz@|IO9<z.Lv gZAmKMta"wD:6m=h_+x9F5UDaAJa"E84-x +JCpb[SM =;j;S3/6\fv* Yl @%*cIKm-g4 `_mR{#?[`+\}m=6rD3%?A~_?J&xT|6=/1suNdoQx3C3)u!zuT (>iXt:A8AhT8}p;~ALx`qv;$S]6PBF8P + a(xf1ejfvB'<^ixDjQ[V:n7 BH(MzFqOJu9JWxKA'F$@rZ9b:yPX@''T+Mb_e_t(354.ln^3p0MOX-8-z]}ox<$uq 49aXAiiE^7/T}X0^G'LSK^RBaLkoz5Y|p#x#i v\K-#WIPZJ:;a?Y MIP1| \=KylG)}: [V@.ynkxG%'qTC$>3iRDwb/5 Y(vy}:_JdegL!UU~{ErpU@{3g3^Qn^t :GA230t&q$ab&$:.Zr[DGd vbpkQs <D#P'DV& Uu$9K(8I[:Gyf=c~E0wdDt]Iw%iW.AB9tH:.z#?h|D^N+f89r>XX11m0tX|/62g#Wn]T 57U<6 l-Q|SB3a<8XWYJ=|d{Z-.GulO:5UfEQLebt@ +$" ';VlV bnnXqKj/{2McEumUnm0)(eNv>`e5 rpTRQ?cB28sc:&xP]GFa%?Sw Vjn<%uVdkIAY3wj]]TLP!*T)I8w+}"&2N"E]/+sm- m[LMwgzw? gBzH[[46+f%4 =SC+=@:JP&CZTnj(RqLC]BIKr?U(-CM-` ,lE]hC  `r`V/QmAC{Pz{LK{mG$8&Kb1#YXO \V"vr|{""#fSeMDQ\bg8{o+rt M  ,  db2>P~/j%}KPuAl5|@a4qdD (F5=Q3Bc6Z\ -E\@,-P_.3>Wdx6 eqi0dlf{1VlpPDX y= Y Vh41B1*!*8'Bk"J_q IT^2YQ0|g*y)[+h }pA!hpqsYy.0\sCO};@1?[ ;6%t%&7HM`Gz;p gw2 +6$Y [^ U"Ci-ObCNb&^V'Pn'rm3KA09zb_w`_yJ{ 4j`6N8 sm@6x}Y}m13Zu#3!bF6wF* <kJ(K-\Nrr#7D!,d P3v)SftdzhnY *?/0-`?7wy0^@(XOhfwm][3-%x?HPIH,gM `?2& < )'R5Vl\5P#^}hDXV>)4 q_ J#W*yMEP`l>$ bfzg6WXN#K5fv.A_-9M>bv94u }LVRVI6^U}l^ $#\l`$4ay"f(o iPz Rahos5dH b7 |cz 1]|L pD&l,vBR?r` 1[J`~c[iHavGd3 l4M0ySY:y"w$oSOfPoTjOG/BWkWiy>C\`f#x#(ifoPla)O TiTs5"bi.!lGIZ$C4 ]F",Ouy}IG&!@Lo'"ihXisfao+kwe2BT)\T;)% 5a-mN^Ck>>*wTmQ/sOQ,!e/PMi_M(EWDP,a3&%T ^N, tKM2^axgG`aY!Y0"K;9'j Q(U~Zrk)n/[gt(w Ay\2Q\E_+w6kD:CRR2nT^A<53-{C In,a!et6+ >p- wFi aT(>x\Q07v19mWFt!RbA_bl08'x.q,,baSY~Nxeoizc( (r\JdxtrZ7@+Z|?~!?WxPnKN 8gg5xi2e!2J&8\ItV@F-tT_>v, BqH-VumN\%Th33q5_lVMPv0/u@/MbqaVho+CWIU$z}}wc$`2&u4d~/d3+@A} Q,uSs2.d7[dukh3x.Gbt+,U |6}F:AU@Xw,2Ga:< [%$%Nz.5zA%H23 lCbZ J16!LGc<;B5v68h,6!9L5`%>"u Dlb9JG?*&B7vR#}_{M0<;0p$#-M,L65OGk td6tYu Am{a'}i$O6zw-;5|[Sq|e6[`%CW{}Mn{<'{Kgs1 .6J*8s d5 t+~ O?_ 9KN7ap4!h(1=rqhUL<>{6$3@'0` m;c ;letZF1]yW+A~*_<*,OOG6FV 2}KhAOw5>&| ^@-)$W8&~Ndfe}<nW!7k)q6 0Bs9*6%=J.UY/r7V@ ^!/QKOqo(( 8 Kv#RB\b_Ti0'^ /%W?=#Im( @ cQEH(4YNX3F/[ bbapE^3|;kSq!6@R:i ` B~Oa>uzuH Z[l`o/ H~+CDq%r-9#ne .L%{[ rlvtOVNCM&Jyf# Ifj) 9 tb/i@BD*~bF MzqDtQfd-d qUg/ONK?10*BdG< l6 ((9"fqJnD5i#Vm`hyi?+kI@E2T$,[yg ,r#;ejKn-aKAG!ULa6d";_%SJ*:OX(ZG?a@I9xg {FW#\M5;UT9b]jgRd"^~p6BXOyZy5pVG4?mv4huLkfE6PJJW) jJ@ WS_)BRW4]w?D?[d_v;rye$OekB)g?Nqd@bUXk],.VJPmqD.o+F2_={4`k H97KWpDCKk$td:V"V_|4XU7 Y#)O1gh@ HZ1G2& crOM{* {bYEi%o{h7l ZM`TcyK>uC.O,s3#`+C E{Aq:`'_1)2DEtpU\ESF' QEWd ;Q;9wYF"%gy )Av4,_XpN!9.N/#xQ{7uuN)yfCVF4]lIG?r .?1=1Tgi`0Bj^eFE|,gD;]}N~iSR6L0!\L6zlExlP]ritvBcM*Vk4%X3;;I?H|.h>N@?Cv-y dC # >@#U.(_&~+E(Zr"t.w9.$:n]C`M9}TjSPi9aDIDD#u:Q9>/#^f8WK2qZ(a9TO(({oMXg+J.Q$>3Or )$>DIAL1YIf  rc %@s*( Q\Y2/ 9& WB8'M(FqS+LX;5@8 ^U@vPX?NyE@Z LMA=rhtk \6 3QGS?5>2_ Zm>nJMs%]MpXPY 6tV&`DxC~h-:!Z_kTX!cjm@piwogv *m(Ob_Bg9\s[@)VX `,)Czmh#Q95Xd!'sBswzS:`5>ta@ lCkbq3 eN:NDL{!.:6xvp Ul -s{^oH NF.nH! y]wH>TPgt%Z,84.b6G.#i`I&pGW!5nmnf@c;~BbJWdDZ&&nN[}:LvO}5M#d:jp5 gu G|t[@rSyE\_17laLLtvF_YT?VyGASK9Y_c0_HD+")w@."wY'/Q'un q|%3_zo@90$Q@ 983GU, 03+^`:zE0;qewUz9Ms$03m#~0c&k{r zJNr/WnQ:.&1:71LIW|/[wQ=F;ByiE>m0W:{"i{\>T]1n,pFH&F. C{l."yMMP<OY,PcM^QqZ" ,~:d6U:kbc?r]gK?Eu%PTMZ<~mR=>Y~5KRB0+T5F9_NHoX 'czAsh~6TN9&uj/Jq~!> :K_Cevk[D$ 1#Uu%'B&G,U/}{B9Ip)AE!Bo .Si2#W-C_UDy7'rsz!t ;>\)2rwsNRY?t7?QraP#c_Q2q$9,6kwz1CO)+i}onAKXoN/k%UE*1$,H 'g &?jR/B]GpP;Y;[9L C*}  Apv6(q$d6;opc[O*;;24^ 8D&H@YnTe~8h'o4PAy* OTR \w?>[*A/T@P`2/t)lshAUcc=8l1{j[\s()kUt'Xo'=~,=>1lCV^@oO@CaH`P.CYw2]2.nz&Em41K>KM3s{\{ekWe=EB|n=LqzlrV.iu5gE4KjKAYGbk@{4r5\Vn& }z:g3b(WjniQ+8hOn1J-QIZ7 |E30{l>vzTam"6kv[]zJOh2=0lSJ N3L})EPXkN3$q_kI_dQ>$uj(&[lv8[ fnP *;U5Bka20p]16.pDko< =WZT{) _,^6HEH6?>fJB .B"szXZo{F]uo 2Tx6onPDu}=\ad@*Z= 9S%'!{ET-*DQoULe]uOMR% xI#V]KL <ko bZm<.z\>1 [F@7I7U,\i Q|G(5Lcu< |f=xaoVyBok30??/[uS1BE KGhz&2fVnhobp>@]Ri (*MAYn-%'=~[JUd ij&=Dq>_{meHnxK?d>S]@br\G Mv6Y`jiHH syrPV-!]/qgx` MIqv:>}\$DrRPL)`gJ4kdX3G?EhrL.QW9_Dt+e(O{]Z;t7EUrE$FMM4",HTr%rl<"jWLed+K^i ~yWp/Xtqy*f*r*b34q<U2?3bn!:jj6tOenObJ'$Vqh9C5h{'fQ|ut a7%~rp*QeFV3NfQtCcw]\t]E 4 nDYf`ba3:dju 'T?~h}}.}4!6bC4; 1y$?vr, 0WE]<{s7D{a\8qlJH(z]LNV o$8IBLw4xacqdC}!6}|)XT;@ Fe]"X)?Df-2KaM8yR= X m0GO <|c?0Xc/q; A=E6 ;N>1/k=WllXcH=Jo\:b>2F:oERJ|>o+^j !o^,Rd/g-^.IquT81m_ c'))l1QInl~Zpf5]n?Vg8 W[z1(0:.K(tN/48l :Nr/ $,0d[{TdNp d,.>jTdI1YGHd=M"70eTAXM;"ser:*G mv\vrbS)"wvaXdLC?8+?????&SsN771a*ܥ60A: 0 @  RL  Topography+H-terminated n-doped Si(111), peltier scope)C:\spmdata\2018\July\Jul17\07172018AG.sm407/17/1815:09:42mmm0256155/^U5 f ]  C/l?ee1q>A cR$ !!""!!"f""a####z#P##a#C#L#,#"""! I 8!H"#i##!$%_%%%$$%Z%%%&%$$t$+$|#R##Q#"##${#%##"##"q""6#C#V##""""###""Q"+#$z$$w$$$$ $ $x$$#:#"$##W##"f"""b##"!"g#,#|##""m""###"""!5"3"!"K"""!""|"""u#""""#"!!""/"! `Y$ON}ZOb:M8]Yl*MP/&yp p vi(%XTd !]"! w m 'wq}k !!!i"""""@##O$$$c#"#"##"#""! Uz!"2$\%]%%R%%&N&%\%&%%%h%8%O%y$$$$##u#"5"!Y!k""#$3#"! "w#$G$$8#(######N""####$$$@% %b$ $0$q$$$8${##""""-"""""!!P""##S#h#O## #6##""""~"9""!"i""!!!!!v""#""##"!F""K"?"! \-+SX/V`x*zI9%O43hL%n' 1 8*F@a]  BQH>$D[[>C!!_!/!!'"g"]"%### $$$###""""z""2"!" ! (";#P$$Y$$'%&%5%$$%$0%$$$$.$$$$# ##""W! r!O"#<#"!F!!^""""(""R""""+##"2#*#]##)$Q$$^$##4$$$$g#.##2#""R"!""":#"""#j$$@$##$###k"$"g"D" ""!!!!!!!!!!!d"""#X#O"!!!!!! !N^LGdx*c1=T?O`4t wRYJ;dIY@Qp9 D!! @y{id5/5NA 3 8 !\""!!"#"d""U##$$$!#""|""{"o"S""r!!W!] 24]m!"#$%$$%%%f%%"%$%%f%$a$#$$##j####"I"*!+!L"G"!!!~!!""":#"""?"}"""""""###=$_$4$##=$$o$$#.#"""W">"!!!!!!X!!z"#b#.#""""" #"7"E"E""["!!!!!!!`!m!u!!5"!""#y#%"!!!!!V! DqL3vBop*x:2I8#~/C*tV;XD.]6 t !` M]upp1_3 6qC B W !S!1!!("i"y"a"e"R"d"j"""""O"!5! % !""*#]##h$$$$C$$$$%$E$######W##""%"!!.""Q!J!#!4!c!!"/"!!v!! ""q"L"!|! "r"" #s#r###### $c$>$#h#"""q"*"!,!5!0!A!!!!!!!("@"":"N"V""""g"i"m""!r!6!(!9!G!>!D!K!!!! !!!!%""!! "!R"""!d; p^3_x`_;!m\"#?, *!:  ;&X3H 'w` S_G{T: -!!"K"n"k"" ""B"="(""!!8! 3 < !a"""##$`$c$N$#2$3$o$$T$#n#n#W#P#"""#""J"8"'"#"!b! *!\!!!!!B!K!\!!!!!S!! "w"$r#"Q#'##(#:#^####Q#""""""!!O!#!! o!#K####### $;$#"/"k!! !:!B!!E!*!a!!{! ! Y 4 _!a!d!f!#Y#(#"N"!!!!!f!! K!8! !@!_!!!!t!`!!!%"-"!;! } e k o f '! n N Z L!!!! L!!e!H! ( G_]!Gf;]mW 9ML+P|<]nJ@t;:'<Y=?4b]$3`c[:')t  } C | s i i!!!"."*""!!"Y"G"'"!!L! d| >!!""\##S$9$!$###N$j$9$#Q##""v"c"s"""!!!!!!!!!!!! ""!!!!!!!u!h!!U!l!X"""""""".#H#"""!!!!!!M! !?!?!&! !o!!!!c!9! !!L!!!!:! m ~ i W p L / q ! c d !![! P LL$a}t'(];moe{: EZqkcfb?$$zNh7+}!|>u0C+ L!!!"B"T"5""""H"L"""!! Q O S!S!c!r!!!"c##$### $#$+$$#U#""""]"T""^""!!!!!!!!!! ""!!!!!!!!!z!a! _!9"\""""""#"""P"!!$!!T!!!I! !! ,!K!!!9! 2!! ~ p @ = Z K h  P ! " U'/NJSbn)ysgaG6Ae#5ME?RzyoeV1BPRlR [&S`]%EF*b fWK{{{L $!!!"z"""c"N""C"]"C":"4"!*!P @ v!!!!!!!@""##4$#V#S##$$#5#""|"""""Z"!!`!!!!!!!!"=""!!!!""""""!y! =!!!!!!!6"u">"" ""!6! q N ! !!M!!!! ^ q v ~ H   6 t V P ! @fYO&?w3wK0eO}Rq8/?*`z3(HlPo-Ic 2^mPR/ r!!!:"""!#>#"""'#""""I"! w& !&"""m"6"H"{"u""#" ##""#####I#/# #")#&##"^""!!!""!!8"J"/"=""!!!%"'""&""!W!!!y!!!!!!!"%"#""!!~! c K  s r %!E! ! n o K {  ! B N G S , 0  U:<+1{nLx#54 $*8,T}5Tr<,CMm5S`N)w| e!!7"w"#o##m##%$#(##"# #"2"! e&l !"""""""""""""""-#$$###q#\#B#g#u#A#""."!!!!!'"["q"Y"9")"""3")""!!!8"!!h!!|!!!!{!!!!!!!!!J! ! 4  Z ! V s p F = ~ Y n J H g e r Y { Y   E 6 e j J ] y M o m  pM  x/2D=+1%dZRu.y^SO1Irs~ /.@95Wg4T ^I#cv[l$SXvL87T !e!!,""u##I#H#q##O$U$$b$$##F#"!H!` ,u _! "L""s"""""## #%# ##"""#####n#I##V$0$#f###"!d!! $!!S""""Q"r"""8#S#""""""""d" "!!"G""!!!!!Q! c > N > P U I - > m n  A s " : #  + 3 q S : . b : y <F {q7 q?k#R(vuzh{ii  %0lvr0HjuWre_DJ6"eRq \ F$[>! 9!!!!."""####j#X##=$$W$#w#")"}!!  8 z!!Z"""@"+"X"""" ##"## #7#.#'#7#*#!#6#a###b#^#5#"?"!x!:!A!_!P!!B"k"]"*""q""?#=##"##t###3#"e"b""""i"!!k""!L! !G!=!#!! s u } U  +   J w a   !! v @ U o + ^5D3I7"cfhJ (!9!;9#JF=as/4tn  ts}GHY&_abc8#uc` P !u!!2"""""=#B#6##""h###G#""!Q!.!""|"Z""":""""x"]"J"s"m"T"J","H"f"N"!g!*!y!!r!Z!]!!!!i!a!i!! ""r! o !!d!!Z!%!'! !! 6!!!:!!!X!"("!C! ? 0 W M f4n^oHe]?odzp~ 8%90Z hjZSFPa#^@M0Xdr[$jWa!O^I5# H c!!"@"r""""""""""&##"""~"z"D"J"W"C""!!!!X""!!]""""!!!""!!!!!!!!!!!T!! +!P!G!|!!!! !#!}!! R K t + | %! zY( z k F ? Cks/{EvT j Pi=rSyF w7{$(+M@?;RP(y| kG./ !I_#TUjgqSIt 8!!"C"9"K"]"q"i""""""""""""#""v"0"-"7""!!!""!!p!s!!!!!!!!!!!!y!l!!!#! J! ! Y!w!7! j O m [ d=% ~o  n { P  X  V-t{L=VniJ7Z~aoG6$"L=,r>,j_ #$Y:wC9/X6PrN R!!!!! 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